Inventor
MAEDA SHUNZI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “MAEDA SHUNZI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS7081953B2Jul 25, 2006
Apparatus and method for inspecting pattern
HITACHI LTD11 citations92
US6831737B2Dec 14, 2004
Apparatus and method for inspecting pattern
HITACHI LTD14 citations92
US7911601B2Mar 22, 2011
Apparatus and method for inspecting pattern
HITACHI LTD3 citations62
US7446866B2Nov 4, 2008
Apparatus and method for inspecting pattern
HITACHI LTD0 citations51