Inventor

BENZ DANIEL

DE6 patents

⚠️ This page may combine multiple inventors who share the name “BENZ DANIEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US9523922B2Dec 20, 2016

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

ZEISS CARL SMT GMBH3 citations71

US9535336B2Jan 3, 2017

Microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH0 citations51

BLEIDISTEL SASCHA

1 patent

US8767176B2Jul 1, 2014

Microlithographic projection exposure apparatus

BLEIDISTEL SASCHA6 citations82

KUECK HEINZ

1 patent

US8241019B2Aug 14, 2012

Pump element and pump having such a pump element

KUECK HEINZ3 citations55

BACH FLORIAN

1 patent

US8797507B2Aug 5, 2014

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

BACH FLORIAN2 citations54

WALDIS SEVERIN

1 patent

US8717531B2May 6, 2014

Mirror for guiding a radiation bundle

WALDIS SEVERIN1 citations44