Inventor
YANG CHUL-KYU
KR17 patents
Patents
17 patentsUS9851632B2Dec 26, 2017
Phase-shift blankmask and photomask
S&S TECH CO LTD2 citations71
US9229317B2Jan 5, 2016
Blankmask and method for fabricating photomask using the same
S&S TECH CO LTD3 citations70
US10942445B2Mar 9, 2021
Blankmask and photomask, and methods of fabricating the same
S&S TECH CO LTD0 citations61
US11815801B2Nov 14, 2023
Reflective type blankmask and photomask for EUV
S&S TECH CO LTD0 citations59
US11579521B2Feb 14, 2023
Reflective type blankmask and photomask for EUV
S&S TECH CO LTD0 citations59
US11940725B2Mar 26, 2024
Phase shift blankmask and photomask for EUV lithography
S&S TECH CO LTD1 citations58
US11360377B2Jun 14, 2022
Half-tone attenuated phase shift blankmask and photomask for EUV lithography
S&S TECH CO LTD0 citations58
US11467485B2Oct 11, 2022
Blankmask and photomask for extreme ultraviolet lithography
S&S TECH CO LTD0 citations56
US11435661B2Sep 6, 2022
Reflective type blankmask for EUV, and method for manufacturing the same
S&S TECH CO LTD0 citations56
US11927880B2Mar 12, 2024
Phase shift blankmask and photomask for EUV lithography
S&S TECH CO LTD0 citations55
US12541144B2Feb 3, 2026
Phase shift blankmask and photomask for EUV lithography
S&S TECH CO LTD0 citations51
US10018905B2Jul 10, 2018
Phase shift blankmask and photomask
S&S TECH CO LTD0 citations50
US9389500B2Jul 12, 2016
Mask blank, photomask, and method for manufacturing same
S&S TECH CO LTD0 citations50
US8846276B2Sep 30, 2014
Blankmask and photomask using the same
S&S TECH CO LTD0 citations50
US9551925B2Jan 24, 2017
Blankmask and photomask using the same
S&S TECH CO LTD0 citations49
US10036947B2Jul 31, 2018
Blankmask and photomask using the same
S&S TECH CO LTD0 citations48
US9482940B2Nov 1, 2016
Blankmask and photomask
S&S TECH CO LTD0 citations48