Inventor
JANG KYU-JIN
KR5 patents
Patents
5 patentsUS9851632B2Dec 26, 2017
Phase-shift blankmask and photomask
S&S TECH CO LTD2 citations71
US9229317B2Jan 5, 2016
Blankmask and method for fabricating photomask using the same
S&S TECH CO LTD3 citations70
US10018905B2Jul 10, 2018
Phase shift blankmask and photomask
S&S TECH CO LTD0 citations50
US9551925B2Jan 24, 2017
Blankmask and photomask using the same
S&S TECH CO LTD0 citations49
US9482940B2Nov 1, 2016
Blankmask and photomask
S&S TECH CO LTD0 citations48