Inventor
TAO YEZHENG
US24 patents
⚠️ This page may combine multiple inventors who share the name “TAO YEZHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
18 patentsUS8872143B2Oct 28, 2014
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV23 citations92
US9380691B2Jun 28, 2016
Adaptive laser system for an extreme ultraviolet light source
ASML NETHERLANDS BV7 citations82
US9357625B2May 31, 2016
Extreme ultraviolet light source
ASML NETHERLANDS BV11 citations79
US8866110B2Oct 21, 2014
Extreme ultraviolet light source
ASML NETHERLANDS BV5 citations73
US9338870B2May 10, 2016
Extreme ultraviolet light source
ASML NETHERLANDS BV3 citations72
US10064261B2Aug 28, 2018
Extreme ultraviolet light source
ASML NETHERLANDS BV3 citations68
US9462668B2Oct 4, 2016
Target for extreme ultraviolet light source
ASML NETHERLANDS BV3 citations68
US9232624B2Jan 5, 2016
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV2 citations62
US12245350B2Mar 4, 2025
Optical isolation module
ASML NETHERLANDS BV0 citations59
US11553582B2Jan 10, 2023
Optical isolation module
ASML NETHERLANDS BV0 citations59
US12369244B2Jul 22, 2025
Laser system for source material conditioning in an EUV light source
ASML NETHERLANDS BV0 citations51
US9155179B2Oct 6, 2015
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US9107279B2Aug 11, 2015
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US8912514B2Dec 16, 2014
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US9826616B2Nov 21, 2017
Extreme ultraviolet light source utilizing a target of finite extent
ASML NETHERLANDS BV0 citations49
US10645789B2May 5, 2020
Optical isolation module
ASML NETHERLANDS BV0 citations48
US9832855B2Nov 28, 2017
Optical isolation module
ASML NETHERLANDS BV0 citations48
US10663866B2May 26, 2020
Wavelength-based optical filtering
ASML NETHERLANDS BV0 citations39