Inventor
RAFAC ROBERT J
US25 patents
⚠️ This page may combine multiple inventors who share the name “RAFAC ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
12 patentsUS7088758B2Aug 8, 2006
Relax gas discharge laser lithography light source
CYMER INC33 citations92
US6952267B2Oct 4, 2005
Method and apparatus for measuring bandwidth of a laser output
CYMER INC35 citations92
US8791440B1Jul 29, 2014
Target for extreme ultraviolet light source
CYMER INC25 citations91
US7317536B2Jan 8, 2008
Spectral bandwidth metrology for high repetition rate gas discharge lasers
CYMER INC10 citations84
US8014432B2Sep 6, 2011
Regenerative ring resonator
CYMER INC12 citations83
US7684046B2Mar 23, 2010
Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
CYMER INC6 citations73
US7639364B2Dec 29, 2009
Methods and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
CYMER INC7 citations73
US7304748B2Dec 4, 2007
Method and apparatus for bandwidth measurement and bandwidth parameter calculation for laser light
CYMER INC9 citations73
US8563956B1Oct 22, 2013
Intracavity loss element for power amplifier
CYMER INC6 citations67
US7733494B2Jun 8, 2010
Bandwidth measuring device for high pulse repetition rate pulsed laser
CYMER INC3 citations62
US9000403B2Apr 7, 2015
System and method for adjusting seed laser pulse width to control EUV output energy
CYMER INC3 citations61
US7411686B2Aug 12, 2008
Methods and apparatus for aligning an etalon with a photodiode array
CYMER INC0 citations52
ASML NETHERLANDS BV
9 patentsUS8872143B2Oct 28, 2014
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV23 citations92
US9232623B2Jan 5, 2016
Extreme ultraviolet light source
ASML NETHERLANDS BV8 citations84
US9239269B1Jan 19, 2016
Calibration of photoelectromagnetic sensor in a laser source
ASML NETHERLANDS BV6 citations69
US9516729B2Dec 6, 2016
Variable radius mirror dichroic beam splitter module for extreme ultraviolet source
ASML NETHERLANDS BV3 citations68
US9232624B2Jan 5, 2016
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV2 citations62
US9239268B1Jan 19, 2016
Calibration of photoelectromagnetic sensor in a laser source
ASML NETHERLANDS BV2 citations58
US9155179B2Oct 6, 2015
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US9107279B2Aug 11, 2015
Target for laser produced plasma extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US8912514B2Dec 16, 2014
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51