Inventor
GOLICH DANIEL J
US4 patents
⚠️ This page may combine multiple inventors who share the name “GOLICH DANIEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
3 patentsUS9380691B2Jun 28, 2016
Adaptive laser system for an extreme ultraviolet light source
ASML NETHERLANDS BV7 citations82
US9155179B2Oct 6, 2015
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51
US8912514B2Dec 16, 2014
Target for extreme ultraviolet light source
ASML NETHERLANDS BV0 citations51