Inventor
VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS
NL11 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS9606457B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations65
US11644755B2May 9, 2023
Lithographic method
ASML NETHERLANDS BV0 citations55
US7756597B2Jul 13, 2010
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program
ASML NETHERLANDS BV4 citations54
US12405542B2Sep 2, 2025
Method of determining a mark measurement sequence, stage apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9964865B2May 8, 2018
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46
US7817241B2Oct 19, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39
US10627721B2Apr 21, 2020
Lithography apparatus, and a method of manufacturing a device
ASML NETHERLANDS BV0 citations36