Inventor
BLANCO CARBALLO VICTOR MANUEL
NL7 patents
Patents
7 patentsUS10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US10509331B2Dec 17, 2019
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV2 citations66
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46
US10845716B2Nov 24, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations45
US10627721B2Apr 21, 2020
Lithography apparatus, and a method of manufacturing a device
ASML NETHERLANDS BV0 citations36