Inventor
KOX RONALD FRANK
NL5 patents
Patents
5 patentsUS11372339B1Jun 28, 2022
Device manufacturing method and computer program
ASML NETHERLANDS BV0 citations53
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10534271B2Jan 14, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations34