Inventor
VIEYRA SALAS JORGE ALBERTO
NL12 patents
Patents
12 patentsUS10241418B2Mar 26, 2019
Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
ASML NETHERLANDS BV9 citations80
US10613445B2Apr 7, 2020
Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process
ASML NETHERLANDS BV3 citations69
US10509331B2Dec 17, 2019
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV2 citations66
US12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11372339B1Jun 28, 2022
Device manufacturing method and computer program
ASML NETHERLANDS BV0 citations53
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US10534270B2Jan 14, 2020
Lithography apparatus, a method of manufacturing a device and a control program
ASML NETHERLANDS BV0 citations46
US10261422B2Apr 16, 2019
Lithography apparatus and method of manufacturing a device
ASML NETHERLANDS BV0 citations46
US10845716B2Nov 24, 2020
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations45