Inventor
WAKANA KATSUHIKO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “WAKANA KATSUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
4 patentsUS10925143B2Feb 16, 2021
Laser apparatus and EUV light generating system
GIGAPHOTON INC3 citations67
US11036150B2Jun 15, 2021
Extreme ultraviolet light generation apparatus and maintenance method
GIGAPHOTON INC0 citations56
US9229192B2Jan 5, 2016
Mirror device
GIGAPHOTON INC1 citations51
US11007778B2May 18, 2021
Droplet discharge apparatus and calculation method
GIGAPHOTON INC0 citations46