Inventor
NGUYEN HANH D
US10 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN HANH D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6110322AAug 29, 2000
Prevention of ground fault interrupts in a semiconductor processing system
APPLIED MATERIALS INC65 citations89
US9416450B2Aug 16, 2016
Showerhead designs of a hot wire chemical vapor deposition (HWCVD) chamber
APPLIED MATERIALS INC7 citations82
US10550472B2Feb 4, 2020
Flow control features of CVD chambers
APPLIED MATERIALS INC2 citations73
US12146219B2Nov 19, 2024
Flow control features of CVD chambers
APPLIED MATERIALS INC0 citations62
LIU WEI
3 patentsUS8999106B2Apr 7, 2015
Apparatus and method for controlling edge performance in an inductively coupled plasma chamber
LIU WEI43 citations93
US8137463B2Mar 20, 2012
Dual zone gas injection nozzle
LIU WEI36 citations91
US8062472B2Nov 22, 2011
Method of correcting baseline skew by a novel motorized source coil assembly
LIU WEI3 citations61