Inventor

MORIKAWA HARUO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “MORIKAWA HARUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UENO MASAAKI

2 patents

US8501599B2Aug 6, 2013

Substrate processing apparatus and substrate processing method

UENO MASAAKI470 citations97

US8507296B2Aug 13, 2013

Substrate processing method and film forming method

UENO MASAAKI4 citations60

KOKUSAI ELECTRIC CORP

1 patent

US11359283B2Jun 14, 2022

Reaction tube structure and substrate processing apparatus

KOKUSAI ELECTRIC CORP0 citations48