Inventor
SATOGUCHI YUICHI
JP3 patents
Patents
3 patentsUS5694325ADec 2, 1997
Semiconductor production system
TOSHIBA KK128 citations95
US5495417AFeb 27, 1996
System for automatically producing different semiconductor products in different quantities through a plurality of processes along a production line
TOSHIBA KK234 citations92
US6925343B2Aug 2, 2005
Flow conversion system for a manufacturing process, method for converting a process flow, system for controlling manufacturing process, method for controlling a manufacturing process and a computer program product
TOSHIBA KK3 citations59