Inventor
GALE GLENN W
US10 patents
⚠️ This page may combine multiple inventors who share the name “GALE GLENN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
9 patentsUS6276370B1Aug 21, 2001
Sonic cleaning with an interference signal
IBM90 citations97
US6254796B1Jul 3, 2001
Selective etching of silicate
IBM24 citations92
US6191085B1Feb 20, 2001
Method for cleaning semiconductor devices
IBM17 citations92
US6117796ASep 12, 2000
Removal of silicon oxide
IBM23 citations92
US5962384AOct 5, 1999
Method for cleaning semiconductor devices
IBM40 citations92
US6356653B2Mar 12, 2002
Method and apparatus for combined particle location and removal
IBM16 citations80
US6783599B2Aug 31, 2004
Method of cleaning contaminants from the surface of a substrate
IBM16 citations79
US6514355B1Feb 4, 2003
Method and apparatus for recovery of semiconductor wafers from a chemical tank
IBM11 citations67
US5966631AOct 12, 1999
Forced plug processing for high aspect ratio structures
IBM4 citations54