Inventor
MONTANINO GREG
US6 patents
Patents
6 patentsUS5861061AJan 19, 1999
Spin coating bowl
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US6680078B2Jan 20, 2004
Method for dispensing flowable substances on microelectronic substrates
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US6168660B1Jan 2, 2001
Spin coating bowl
MICRON TECHNOLOGY INC24 citations91
US6140253AOct 31, 2000
Spin coating bowl
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US6559072B2May 6, 2003
Develop processing method of a resist surface of a substrate for reduced processing time and reduced defect density
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US6806209B2Oct 19, 2004
Develop processing method of a resist surface on a substrate for reduced processing time and reduced defect density
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