Inventor
GRIFFIS DIETER P
US4 patents
Patents
4 patentsUS6514866B2Feb 4, 2003
Chemically enhanced focused ion beam micro-machining of copper
UNIV NORTH CAROLINA STATE32 citations89
US6140655AOct 31, 2000
Method for water vapor enhanced charged-particle-beam machining
UNIV NORTH CAROLINA STATE31 citations88
US5958799ASep 28, 1999
Method for water vapor enhanced charged-particle-beam machining
UNIV NORTH CAROLINA STATE37 citations88
US6645872B2Nov 11, 2003
Chemically enhanced focused ion beam micro-machining of copper
UNIV NORTH CAROLINA STATE8 citations70