Inventor
ADAM KLAUS-DIETER
DE8 patents
⚠️ This page may combine multiple inventors who share the name “ADAM KLAUS-DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VISTEC SEMICONDUCTOR SYS GMBH
6 patentsUS7450246B2Nov 11, 2008
Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
VISTEC SEMICONDUCTOR SYS GMBH8 citations70
US7769556B2Aug 3, 2010
Method for correcting measuring errors caused by the lens distortion of an objective
VISTEC SEMICONDUCTOR SYS GMBH2 citations60
US7551296B2Jun 23, 2009
Method for determining the focal position of at least two edges of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH5 citations59
US7948635B2May 24, 2011
Method for determining positions of structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations42
US7872763B2Jan 18, 2011
Device for measuring the position of at least one structure on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations42
US7961334B2Jun 14, 2011
Coordinate measuring machine for measuring structures on a substrate
VISTEC SEMICONDUCTOR SYS GMBH0 citations39