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Inventor
ISING ULRICH
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “ISING ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PETER WOLTERS CMP SYSTEME GMBH
1 patent
US6780083B2
Aug 24, 2004
Apparatus and method for the chemical mechanical polishing of the surface of circular flat workpieces, in particular semi-conductor wafers
PETER WOLTERS CMP SYSTEME GMBH
13 citations
76
PETERS WOLTERS SURFACE TECHNOL
1 patent
US7101258B2
Sep 5, 2006
Double sided polishing machine
PETERS WOLTERS SURFACE TECHNOL
14 citations
72