Inventor
CHEN FOREST
US4 patents
Patents
4 patentsUS7321150B2Jan 22, 2008
Semiconductor device precursor structures to a double-sided capacitor or a contact
MICRON TECHNOLOGY INC39 citations95
US7268039B2Sep 11, 2007
Method of forming a contact using a sacrificial structure
MICRON TECHNOLOGY INC40 citations95
US7273779B2Sep 25, 2007
Method of forming a double-sided capacitor
MICRON TECHNOLOGY INC31 citations92
US6962846B2Nov 8, 2005
Methods of forming a double-sided capacitor or a contact using a sacrificial structure
MICRON TECHNOLOGY INC34 citations92