Inventor
FLORKEY JOHN E
US6 patents
Patents
6 patentsUS7410894B2Aug 12, 2008
Post last wiring level inductor using patterned plate process
IBM9 citations84
US7910450B2Mar 22, 2011
Method of fabricating a precision buried resistor
IBM7 citations83
US7735216B2Jun 15, 2010
Micro-electromechanical sub-assembly having an on-chip transfer mechanism
IBM12 citations83
US6831542B2Dec 14, 2004
Micro-electromechanical inductive switch
IBM11 citations73
US7691717B2Apr 6, 2010
Polysilicon containing resistor with enhanced sheet resistance precision and method for fabrication thereof
IBM5 citations62
US7285472B2Oct 23, 2007
Low tolerance polysilicon resistor for low temperature silicide processing
IBM4 citations62