Inventor

REYNOLDS WILLIAM P

US4 patents

⚠️ This page may combine multiple inventors who share the name “REYNOLDS WILLIAM P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

2 patents

US7531819B2May 12, 2009

Fluorine based cleaning of an ion source

AXCELIS TECH INC18 citations77

US10692749B2Jun 23, 2020

Method to provide consistent electrostatic clamping through real time control of electrostatic charge deposition in an electrostatic chuck

AXCELIS TECH INC0 citations37

LEE WILLIAM D

1 patent

US9236216B2Jan 12, 2016

In-vacuum high speed pre-chill and post-heat stations

LEE WILLIAM D3 citations68

REYNOLDS WILLIAM P

1 patent

US8450701B2May 28, 2013

Vacuum system cold trap filter

REYNOLDS WILLIAM P1 citations37