Inventor
TONG WEIHUA
US5 patents
Patents
5 patentsUS9418899B1Aug 16, 2016
Method of multi-WF for multi-Vt and thin sidewall deposition by implantation for gate-last planar CMOS and FinFET technology
GLOBALFOUNDRIES INC8 citations82
US9123771B2Sep 1, 2015
Shallow trench isolation integration methods and devices formed thereby
GLOBALFOUNDRIES INC13 citations82
US9385192B2Jul 5, 2016
Shallow trench isolation integration methods and devices formed thereby
GLOBALFOUNDRIES INC3 citations71
US9287180B2Mar 15, 2016
Integrated circuits having finFETs with improved doped channel regions and methods for fabricating same
GLOBALFOUNDRIES INC3 citations70
US9093476B2Jul 28, 2015
Integrated circuits having FinFETs with improved doped channel regions and methods for fabricating same
GLOBALFOUNDRIES INC0 citations49