Inventor

INHOFER WILLIAM P

US5 patents

⚠️ This page may combine multiple inventors who share the name “INHOFER WILLIAM P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL FSI INC

4 patents

US9831107B2Nov 28, 2017

Processing system and method for providing a heated etching solution

TEL FSI INC4 citations70

US10910253B2Feb 2, 2021

Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber

TEL FSI INC5 citations66

US9911631B2Mar 6, 2018

Processing system and method for providing a heated etching solution

TEL FSI INC0 citations49

US9982664B2May 29, 2018

Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates

TEL FSI INC0 citations28

FSI INT INC

1 patent

US6251195B1Jun 26, 2001

Method for transferring a microelectronic device to and from a processing chamber

FSI INT INC43 citations90