Inventor
GOODMAN MATTHEW G
US17 patents
⚠️ This page may combine multiple inventors who share the name “GOODMAN MATTHEW G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
11 patentsUS6776849B2Aug 17, 2004
Wafer holder with peripheral lift ring
ASM INC324 citations98
US6634882B2Oct 21, 2003
Susceptor pocket profile to improve process performance
ASM INC76 citations98
US7070660B2Jul 4, 2006
Wafer holder with stiffening rib
ASM INC51 citations95
US6893507B2May 17, 2005
Self-centering wafer support system
ASM INC75 citations95
US6454865B1Sep 24, 2002
Low mass wafer support system
ASM INC82 citations95
US7449071B2Nov 11, 2008
Wafer holder with peripheral lift ring
ASM INC20 citations92
US6840767B2Jan 11, 2005
Susceptor pocket profile to improve process performance
ASM INC20 citations92
US6729875B2May 4, 2004
Susceptor pocket profile to improve process performance
ASM INC17 citations92
US6709267B1Mar 23, 2004
Substrate holder with deep annular groove to prevent edge heat loss
ASM INC51 citations92
US8047706B2Nov 1, 2011
Calibration of temperature control system for semiconductor processing chamber
ASM INC18 citations83
US6879777B2Apr 12, 2005
Localized heating of substrates using optics
ASM INC16 citations83
ASM IP HOLDING BV
5 patentsUS9474163B2Oct 18, 2016
Germanium oxide pre-clean module and process
ASM IP HOLDING BV411 citations99
US9099423B2Aug 4, 2015
Doped semiconductor films and processing
ASM IP HOLDING BV414 citations99
US9514927B2Dec 6, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV467 citations97
US9299557B2Mar 29, 2016
Plasma pre-clean module and process
ASM IP HOLDING BV472 citations97
US11885019B2Jan 30, 2024
Susceptor with ring to limit backside deposition
ASM IP HOLDING BV0 citations62