Inventor
BROUWER ERIC JOS ANTON
NL4 patents
Patents
4 patentsUS9964853B2May 8, 2018
Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method
ASML NETHERLANDS BV6 citations68
US10691030B2Jun 23, 2020
Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method
ASML NETHERLANDS BV6 citations66
US11385554B2Jul 12, 2022
Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate
ASML NETHERLANDS BV0 citations58
US10895811B2Jan 19, 2021
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations45