Inventor
KANEKO KENGO
JP7 patents
Patents
7 patentsUS11011347B2May 18, 2021
Plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US10923369B2Feb 16, 2021
Temperature controlling apparatus, temperature controlling method, and placing table
TOKYO ELECTRON LTD3 citations71
US7510884B2Mar 31, 2009
Semiconductor production system and semiconductor production process
TOKYO ELECTRON LTD7 citations71
US11735392B2Aug 22, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11837480B2Dec 5, 2023
Temperature controlling apparatus, temperature controlling method, and placing table
TOKYO ELECTRON LTD0 citations60
US7870751B2Jan 18, 2011
Temperature control system and substrate processing apparatus
TOKYO ELECTRON LTD3 citations60
US10361089B2Jul 23, 2019
Plasma processing method
TOKYO ELECTRON LTD0 citations40