Inventor
ABRAMOV AVI
IL13 patents
⚠️ This page may combine multiple inventors who share the name “ABRAMOV AVI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
8 patentsUS10203247B2Feb 12, 2019
Systems for providing illumination in optical metrology
KLA TENCOR CORP10 citations81
US11156846B2Oct 26, 2021
High-brightness illumination source for optical metrology
KLA TENCOR CORP2 citations72
US10677588B2Jun 9, 2020
Localized telecentricity and focus optimization for overlay metrology
KLA TENCOR CORP5 citations71
US9341769B2May 17, 2016
Spectral control system
KLA TENCOR CORP2 citations62
US9512985B2Dec 6, 2016
Systems for providing illumination in optical metrology
KLA TENCOR CORP2 citations60
US11187838B2Nov 30, 2021
Spectral filter for high-power fiber illumination sources
KLA TENCOR CORP0 citations51
US9921050B2Mar 20, 2018
Spectral control system
KLA TENCOR CORP0 citations51
US9719940B2Aug 1, 2017
Compressive sensing with illumination patterning
KLA TENCOR CORP0 citations41
KLA CORP
5 patentsUS11300524B1Apr 12, 2022
Pupil-plane beam scanning for metrology
KLA CORP12 citations84
US12001148B2Jun 4, 2024
Enhancing performance of overlay metrology
KLA CORP2 citations70
US12111580B2Oct 8, 2024
Optical metrology utilizing short-wave infrared wavelengths
KLA CORP2 citations67
US11592755B2Feb 28, 2023
Enhancing performance of overlay metrology
KLA CORP1 citations59
US11662562B2May 30, 2023
Broadband illumination tuning
KLA CORP1 citations57