Inventor
CHANG HSIAO-WEI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG HSIAO-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS11011388B2May 18, 2021
Plasma apparatus for high aspect ratio selective lateral etch using cyclic passivation and etching
LAM RES CORP7 citations82
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US10276398B2Apr 30, 2019
High aspect ratio selective lateral etch using cyclic passivation and etching
LAM RES CORP1 citations60