Inventor
KURODA AURÉLIE
JP4 patents
Patents
4 patentsUS9947582B1Apr 17, 2018
Processes for preventing oxidation of metal thin films
ASM IP HOLDING BV5 citations71
US10910262B2Feb 2, 2021
Method of selectively depositing a capping layer structure on a semiconductor device structure
ASM IP HOLDING BV1 citations60
US12230497B2Feb 18, 2025
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
ASM IP HOLDING BV0 citations59
US11610774B2Mar 21, 2023
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
ASM IP HOLDING BV1 citations59