Inventor
BRUGAROLAS BRUFAU TERESA
US15 patents
Patents
15 patentsUS9539694B1Jan 10, 2017
Composite polishing layer chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC8 citations83
US9457449B1Oct 4, 2016
Chemical mechanical polishing pad with composite polishing layer
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC9 citations83
US10293456B2May 21, 2019
Aliphatic polyurethane optical endpoint detection windows and CMP polishing pads containing them
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC3 citations71
US9630293B2Apr 25, 2017
Chemical mechanical polishing pad composite polishing layer formulation
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC2 citations70
US10625393B2Apr 21, 2020
Chemical mechanical polishing pads having offset circumferential grooves for improved removal rate and polishing uniformity
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations51
US12064845B2Aug 20, 2024
Formulations for chemical mechanical polishing pads with high planarization efficiency and CMP pads made therewith
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations49
US11813713B2Nov 14, 2023
Chemical mechanical polishing pad and polishing method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations49
US11806830B2Nov 7, 2023
Formulations for chemical mechanical polishing pads and CMP pads made therewith
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations49
US12064846B2Aug 20, 2024
Formulations for high porosity chemical mechanical polishing pads with high hardness and CMP pads made therewith
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations46
US10144115B2Dec 4, 2018
Method of making polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10105825B2Oct 23, 2018
Method of making polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10092998B2Oct 9, 2018
Method of making composite polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US10011002B2Jul 3, 2018
Method of making composite polishing layer for chemical mechanical polishing pad
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9776300B2Oct 3, 2017
Chemical mechanical polishing pad and method of making same
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39
US9586305B2Mar 7, 2017
Chemical mechanical polishing pad and method of making same
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations39