Inventor
HIROI TAKASHI
JP83 patents
⚠️ This page may combine multiple inventors who share the name “HIROI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
45 patentsUS6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US6107637AAug 22, 2000
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD147 citations99
US5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6759655B2Jul 6, 2004
Inspection method, apparatus and system for circuit pattern
HITACHI LTD74 citations98
US6587581B1Jul 1, 2003
Visual inspection method and apparatus therefor
HITACHI LTD118 citations98
US7692144B2Apr 6, 2010
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD42 citations96
US6919564B2Jul 19, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6753518B2Jun 22, 2004
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD35 citations96
US6614923B1Sep 2, 2003
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
HITACHI LTD49 citations96
US6567168B2May 20, 2003
Inspection method, apparatus and system for circuit pattern
HITACHI LTD38 citations96
US6493082B2Dec 10, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD35 citations96
US6480279B2Nov 12, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD23 citations96
US6476913B1Nov 5, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD59 citations96
US6421122B2Jul 16, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD51 citations96
US6388747B2May 14, 2002
Inspection method, apparatus and system for circuit pattern
HITACHI LTD62 citations96
US6347150B1Feb 12, 2002
Method and system for inspecting a pattern
HITACHI LTD52 citations96
US6335532B1Jan 1, 2002
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD38 citations96
US6333510B1Dec 25, 2001
Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus
HITACHI LTD44 citations96
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US6087673AJul 11, 2000
Method of inspecting pattern and apparatus thereof
HITACHI LTD58 citations96
US5649022AJul 15, 1997
Pattern checking method and checking apparatus
HITACHI LTD79 citations96
US5430548AJul 4, 1995
Method and apparatus for pattern detection
HITACHI LTD70 citations96
US5153444AOct 6, 1992
Method and apparatus for detecting patterns
HITACHI LTD92 citations96
US4772125ASep 20, 1988
Apparatus and method for inspecting soldered portions
HITACHI LTD82 citations94
US7329889B2Feb 12, 2008
Electron beam apparatus and method with surface height calculator and a dual projection optical unit
HITACHI LTD17 citations93
US7133550B2Nov 7, 2006
Pattern inspection method and apparatus
HITACHI LTD19 citations93
US7116816B2Oct 3, 2006
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen
HITACHI LTD41 citations93
US6975754B2Dec 13, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD19 citations93
US6919577B2Jul 19, 2005
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD25 citations93
US6898305B2May 24, 2005
Circuit pattern inspection method and apparatus
HITACHI LTD40 citations93
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6657221B2Dec 2, 2003
Image classification method, observation method, and apparatus thereof with different stage moving velocities
HITACHI LTD24 citations93
US6559459B2May 6, 2003
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD14 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US4641527AFeb 10, 1987
Inspection method and apparatus for joint junction states
HITACHI LTD30 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7269280B2Sep 11, 2007
Method and its apparatus for inspecting a pattern
HITACHI LTD22 citations92
US7263216B2Aug 28, 2007
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof
HITACHI LTD16 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6903821B2Jun 7, 2005
Inspection method, apparatus and system for circuit pattern
HITACHI LTD15 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6236057B1May 22, 2001
Method of inspecting pattern and apparatus thereof with a differential brightness image detection
HITACHI LTD15 citations92
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US7266235B2Sep 4, 2007
Pattern inspection method and apparatus
HITACHI LTD10 citations84
HITACHI HIGH TECH CORP
4 patentsUS7602962B2Oct 13, 2009
Method of classifying defects using multiple inspection machines
HITACHI HIGH TECH CORP27 citations93
US7292327B2Nov 6, 2007
Circuit-pattern inspection apparatus
HITACHI HIGH TECH CORP21 citations92
US7728294B2Jun 1, 2010
Semiconductor wafer inspection tool and semiconductor wafer inspection method
HITACHI HIGH TECH CORP18 citations84
US7521676B2Apr 21, 2009
Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus
HITACHI HIGH TECH CORP16 citations84
WATANABE MASAHIRO
1 patentShowing the top 50 of 83 patents by PatentIndex Score.