Inventor
SHINADA HIROYUKI
JP79 patents
⚠️ This page may combine multiple inventors who share the name “SHINADA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
44 patentsUS6583413B1Jun 24, 2003
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD123 citations99
US6329826B1Dec 11, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD95 citations99
US6172363B1Jan 9, 2001
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD185 citations99
US6107637AAug 22, 2000
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD147 citations99
US5986263ANov 16, 1999
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD164 citations99
US6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US7692144B2Apr 6, 2010
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD42 citations96
US6797954B2Sep 28, 2004
Patterned wafer inspection method and apparatus therefor
HITACHI LTD42 citations96
US6753518B2Jun 22, 2004
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD35 citations96
US6583634B1Jun 24, 2003
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD68 citations96
US6476390B1Nov 5, 2002
Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams
HITACHI LTD68 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US6347150B1Feb 12, 2002
Method and system for inspecting a pattern
HITACHI LTD52 citations96
US6335532B1Jan 1, 2002
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD38 citations96
US6333510B1Dec 25, 2001
Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus
HITACHI LTD44 citations96
US6172365B1Jan 9, 2001
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD48 citations96
US5402295AMar 28, 1995
Magnetic recording head capable of defining narrow track width and magnetic recording apparatus using the same
HITACHI LTD72 citations96
US7329889B2Feb 12, 2008
Electron beam apparatus and method with surface height calculator and a dual projection optical unit
HITACHI LTD17 citations93
US7098455B2Aug 29, 2006
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD26 citations93
US6979823B2Dec 27, 2005
Patterned wafer inspection method and apparatus therefor
HITACHI LTD21 citations93
US6919577B2Jul 19, 2005
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus
HITACHI LTD25 citations93
US6717142B2Apr 6, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD16 citations93
US6559459B2May 6, 2003
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD14 citations93
US6373054B2Apr 16, 2002
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD23 citations93
US5838096ANov 17, 1998
Cathode having a reservoir and method of manufacturing the same
HITACHI LTD40 citations93
US5666053ASep 9, 1997
Charged particle beam apparatus for measuring magnetic field
HITACHI LTD25 citations93
US5616926AApr 1, 1997
Schottky emission cathode and a method of stabilizing the same
HITACHI LTD43 citations93
US5283440AFeb 1, 1994
Electron beam writing system used in a cell projection method
HITACHI LTD34 citations93
US7417444B2Aug 26, 2008
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD25 citations92
US7026830B2Apr 11, 2006
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD19 citations92
US6825480B1Nov 30, 2004
Charged particle beam apparatus and automatic astigmatism adjustment method
HITACHI LTD38 citations92
US6703850B2Mar 9, 2004
Method of inspecting circuit pattern and inspecting instrument
HITACHI LTD37 citations92
US6559663B2May 6, 2003
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD20 citations92
US6509564B1Jan 21, 2003
Workpiece holder, semiconductor fabricating apparatus, semiconductor inspecting apparatus, circuit pattern inspecting apparatus, charged particle beam application apparatus, calibrating substrate, workpiece holding method, circuit pattern inspecting method, and charged particle beam application method
HITACHI LTD39 citations92
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US5932880AAug 3, 1999
Scintillator device and image pickup apparatus using the same
HITACHI LTD24 citations92
US5345080ASep 6, 1994
Method of observing electron microscopic images and an apparatus for carrying out of the same
HITACHI LTD22 citations92
US5763880AJun 9, 1998
Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode
HITACHI LTD33 citations87
US7952074B2May 31, 2011
Method and apparatus for inspecting integrated circuit pattern
HITACHI LTD8 citations84
US7397031B2Jul 8, 2008
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD10 citations84
US6987265B2Jan 17, 2006
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD9 citations82
US6828554B2Dec 7, 2004
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
HITACHI LTD11 citations82
US7526747B2Apr 28, 2009
Inspection method and inspection system using charged particle beam
HITACHI LTD7 citations74
US7439504B2Oct 21, 2008
Pattern inspection method and apparatus using electron beam
HITACHI LTD6 citations74
HITACHI HIGH TECH CORP
4 patentsUS7075076B2Jul 11, 2006
Inspection system, inspection method, and process management method
HITACHI HIGH TECH CORP20 citations93
US7022986B2Apr 4, 2006
Apparatus and method for wafer pattern inspection
HITACHI HIGH TECH CORP30 citations92
US7982188B2Jul 19, 2011
Apparatus and method for wafer pattern inspection
HITACHI HIGH TECH CORP9 citations83
US7223975B2May 29, 2007
Inspection apparatus for circuit pattern
HITACHI HIGH TECH CORP10 citations80
WATANABE MASAHIRO
1 patentRENESAS TECH CORP
1 patentShowing the top 50 of 79 patents by PatentIndex Score.