Inventor
NINOMIYA TAKU
JP24 patents
⚠️ This page may combine multiple inventors who share the name “NINOMIYA TAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
13 patentsUS6583413B1Jun 24, 2003
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD123 citations99
US6310341B1Oct 30, 2001
Projecting type charged particle microscope and projecting type substrate inspection system
HITACHI LTD108 citations98
US6465781B1Oct 15, 2002
Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus
HITACHI LTD85 citations97
US6335532B1Jan 1, 2002
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD38 citations96
US6580075B2Jun 17, 2003
Charged particle beam scanning type automatic inspecting apparatus
HITACHI LTD55 citations95
US7098455B2Aug 29, 2006
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD26 citations93
US6559459B2May 6, 2003
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD14 citations93
US6538248B1Mar 25, 2003
Charged particle beam scanning type automatic inspecting apparatus
HITACHI LTD30 citations92
US7397031B2Jul 8, 2008
Method of inspecting a circuit pattern and inspecting instrument
HITACHI LTD10 citations84
US6885012B2Apr 26, 2005
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD9 citations74
US6744057B2Jun 1, 2004
Convergent charged particle beam apparatus and inspection method using same
HITACHI LTD11 citations74
US5392115AFeb 21, 1995
Method of detecting inclination of a specimen and a projection exposure device as well as method of detecting period of periodically varying signal
HITACHI LTD10 citations74
US6486472B2Nov 26, 2002
Inspecting system using electron beam and inspecting method using same
HITACHI LTD2 citations63
HITACHI HIGH TECH CORP
9 patentsUS7425704B2Sep 16, 2008
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP14 citations92
US7034298B2Apr 25, 2006
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP31 citations92
US7071468B2Jul 4, 2006
Circuit pattern inspection method and its apparatus
HITACHI HIGH TECH CORP16 citations84
US9858659B2Jan 2, 2018
Pattern inspecting and measuring device and program
HITACHI HIGH TECH CORP9 citations83
US8953868B2Feb 10, 2015
Defect inspection method and defect inspection apparatus
HITACHI HIGH TECH CORP4 citations73
US9188554B2Nov 17, 2015
Pattern inspection device and pattern inspection method
HITACHI HIGH TECH CORP6 citations72
US10692693B2Jun 23, 2020
System and method for measuring patterns
HITACHI HIGH TECH CORP1 citations62
US7271385B2Sep 18, 2007
Inspection method and inspection apparatus using electron beam
HITACHI HIGH TECH CORP5 citations59
US7855363B2Dec 21, 2010
Inspection method and apparatus using an electron beam
HITACHI HIGH TECH CORP1 citations52