Inventor

HSIAO HUAI-YU

US2 patents

Patents

2 patents

US10354888B2Jul 16, 2019

Method and apparatus for anisotropic tungsten etching

LAM RES CORP2 citations69

US9633867B2Apr 25, 2017

Method and apparatus for anisotropic tungsten etching

LAM RES CORP3 citations69