Inventor
GOETZ CARL A
US3 patents
Patents
3 patentsUS4699805AOct 13, 1987
Process and apparatus for the low pressure chemical vapor deposition of thin films
MOTOROLA INC102 citations93
US4411619AOct 25, 1983
Flange and coupling cooling means and method
MOTOROLA INC20 citations79
US4480989ANov 6, 1984
Method of cooling a flange and coupling
MOTOROLA INC1 citations49