Inventor · disambiguated record
Seitaro Matsuo
Also filed as: MATSUO SEITARO
12 granted patents·860 citations·filing 1981–2003
94Inventor score
Top patents by PatentIndex Score
12 records- 0197US4450031AIon shower apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1983·Granted May 22, 1984·131 cites·9 claims
- 0296US4492620APlasma deposition method and apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1983·Granted Jan 8, 1985·137 cites·16 claims
- 0396US4401054APlasma deposition apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1981·Granted Aug 30, 1983·226 cites·12 claims
- 0494US5003152AMicrowave transforming method and plasma processingNIPPON TELEGRAPH & TELEPHONE·Filed 1988·Granted Mar 26, 1991·82 cites·18 claims
- 0589US4564997ASemiconductor device and manufacturing process thereofNIPPON TELEGRAPH & TELEPHONE·Filed 1982·Granted Jan 21, 1986·83 cites·6 claims
- 0686US4857809AMicrowave ion sourceNIPPON TELEGRAPH & TELEPHONE·Filed 1988·Granted Aug 15, 1989·39 cites·11 claims
- 0784US5208629AOptical projection exposure method and system using the sameNIPPON TELEGRAPH & TELEPHONE·Filed 1992·Granted May 4, 1993·54 cites·91 claims
- 0873US4448800AMethod for the manufacture of semiconductor device using refractory metal in a lift-off stepNIPPON TELEGRAPH & TELEPHONE·Filed 1982·Granted May 15, 1984·41 cites·7 claims
- 0970US4543266AMethod of fabricating a membrane structureNIPPON TELEGRAPH & TELEPHONE·Filed 1984·Granted Sep 24, 1985·24 cites·12 claims
- 1066US4566940AManufacturing process for semiconductor integrated circuitsNIPPON TELEGRAPH & TELEPHONE·Filed 1984·Granted Jan 28, 1986·24 cites·3 claims
- 1153US4543592ASemiconductor integrated circuits and manufacturing process thereofNIPPON TELEGRAPH & TELEPHONE·Filed 1984·Granted Sep 24, 1985·16 cites·3 claims
- 1247US7485204B2ECR plasma source and ECR plasma deviceMES AFTY CORP·Filed 2003·Granted Feb 3, 2009·3 cites·7 claims
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