Inventor
RASTOGI RAJIV
US5 patents
Patents
5 patentsUS5747879AMay 5, 1998
Interface between titanium and aluminum-alloy in metal stack for integrated circuit
INTEL CORP24 citations86
US5286678AFeb 15, 1994
Single step salicidation process
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US7985328B2Jul 26, 2011
Using cell voltage as a monitor for deposition coverage
INTEL CORP0 citations47
US7371312B2May 13, 2008
Using cell voltage as a monitor for deposition coverage
INTEL CORP0 citations47
US7438794B2Oct 21, 2008
Method of copper electroplating to improve gapfill
INTEL CORP0 citations46