Inventor
LEBEL RICHARD J
US9 patents
Patents
9 patentsUS6334807B1Jan 1, 2002
Chemical mechanical polishing in-situ end point system
IBM113 citations97
US5738568AApr 14, 1998
Flexible tilted wafer carrier
IBM81 citations93
US6319093B1Nov 20, 2001
Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
IBM32 citations92
US5381234AJan 10, 1995
Method and apparatus for real-time film surface detection for large area wafers
IBM36 citations92
US5885135AMar 23, 1999
CMP wafer carrier for preferential polishing of a wafer
IBM32 citations87
US6579149B2Jun 17, 2003
Support and alignment device for enabling chemical mechanical polishing rinse and film measurements
IBM13 citations83
US6967715B2Nov 22, 2005
Method and apparatus for optical film measurements in a controlled environment
IBM10 citations71
US6247368B1Jun 19, 2001
CMP wet application wafer sensor
IBM2 citations59
US7130038B2Oct 31, 2006
Method and apparatus for optical film measurements in a controlled environment
IBM1 citations49