Inventor
TAYLOR CLIFFORD L
US6 patents
Patents
6 patentsUS5620577AApr 15, 1997
Spring-loaded mount for a rotatable sputtering cathode
VIRATEC THIN FILMS INC67 citations94
US5688389ANov 18, 1997
Method and apparatus for thin film coating an article
VIRATEC THIN FILMS INC20 citations91
US5571393ANov 5, 1996
Magnet housing for a sputtering cathode
VIRATEC THIN FILMS INC40 citations91
US5567289AOct 22, 1996
Rotating floating magnetron dark-space shield and cone end
VIRATEC THIN FILMS INC34 citations91
US5539272AJul 23, 1996
Rotating floating magnetron dark-space shield
VIRATEC THIN FILMS INC21 citations91
US5156727AOct 20, 1992
Film thickness uniformity control apparatus for in-line sputtering systems
VIRATEC THIN FILMS INC23 citations88