Inventor
INANOBE TSUYOSHI
JP4 patents
Patents
4 patentsUS7030376B2Apr 18, 2006
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP6 citations72
US7435958B2Oct 14, 2008
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP3 citations61
US7566892B2Jul 28, 2009
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50
US7205550B2Apr 17, 2007
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50