Inventor

SU XINGCAI

US5 patents

⚠️ This page may combine multiple inventors who share the name “SU XINGCAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US7169231B2Jan 30, 2007

Gas distribution system with tuning gas

LAM RES CORP47 citations95

US7371332B2May 13, 2008

Uniform etch system

LAM RES CORP29 citations92

US7041230B2May 9, 2006

Method for selectively etching organosilicate glass with respect to a doped silicon carbide

LAM RES CORP0 citations51

LARSON DEAN J

1 patent

US8801892B2Aug 12, 2014

Uniform etch system

LARSON DEAN J1 citations51

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA

1 patent

US11189496B2Nov 30, 2021

Plasma reactor for ultra-high aspect ratio etching and etching method thereof

ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations49