Inventor
STOKOWSKI STAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “STOKOWSKI STAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
7 patentsUS7379175B1May 27, 2008
Methods and systems for reticle inspection and defect review using aerial imaging
KLA TENCOR TECH CORP99 citations97
US7123356B1Oct 17, 2006
Methods and systems for inspecting reticles using aerial imaging and die-to-database detection
KLA TENCOR TECH CORP126 citations97
US7027143B1Apr 11, 2006
Methods and systems for inspecting reticles using aerial imaging at off-stepper wavelengths
KLA TENCOR TECH CORP107 citations97
US6844927B2Jan 18, 2005
Apparatus and methods for removing optical abberations during an optical inspection
KLA TENCOR TECH CORP35 citations92
US6727512B2Apr 27, 2004
Method and system for detecting phase defects in lithographic masks and semiconductor wafers
KLA TENCOR TECH CORP27 citations92
US6922236B2Jul 26, 2005
Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection
KLA TENCOR TECH CORP36 citations90
US7133119B1Nov 7, 2006
Systems for simulating high NA and polarization effects in aerial images
KLA TENCOR TECH CORP28 citations89
KLA TENCOR CORP
3 patentsUS7738093B2Jun 15, 2010
Methods for detecting and classifying defects on a reticle
KLA TENCOR CORP42 citations89
US6646281B1Nov 11, 2003
Differential detector coupled with defocus for improved phase defect sensitivity
KLA TENCOR CORP11 citations73
US7738092B1Jun 15, 2010
System and method for reducing speckle noise in die-to-die inspection systems
KLA TENCOR CORP6 citations62