P

Inventor

NISHIHASHI TSUTOMU

JP7 patents
⚠️ This page may combine multiple inventors who share the name “NISHIHASHI TSUTOMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ULVAC INC

3 patents
US6930316B2Aug 16, 2005

Ion implantation system and ion implantation method

ULVAC INC60 citations90
US11112176B2Sep 7, 2021

Freeze vacuum drying apparatus and freeze vacuum drying method

ULVAC INC6 citations68
US7847271B2Dec 7, 2010

Ion implanting apparatus

ULVAC INC0 citations46

TONARI KAZUHIKO

2 patents
US8383496B2Feb 26, 2013

Plasma doping method and manufacturing method of semiconductor device

TONARI KAZUHIKO2 citations54
US8440551B2May 14, 2013

Plasma doping method and manufacturing method of semiconductor device

TONARI KAZUHIKO0 citations44

ULVAC CO LTD

1 patent
US7511288B2Mar 31, 2009

Ion implantation device

ULVAC CO LTD7 citations65

NISHIHASHI TSUTOMU

1 patent
US8791433B2Jul 29, 2014

Ion implanting apparatus

NISHIHASHI TSUTOMU0 citations34