Inventor
HSIA SHOULI STEVE
US9 patents
⚠️ This page may combine multiple inventors who share the name “HSIA SHOULI STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
6 patentsUS6060370AMay 9, 2000
Method for shallow trench isolations with chemical-mechanical polishing
LSI LOGIC CORP20 citations92
US6174798B1Jan 16, 2001
Process for forming metal interconnect stack for integrated circuit structure
LSI LOGIC CORP15 citations83
US6037262AMar 14, 2000
Process for forming vias, and trenches for metal lines, in multiple dielectric layers of integrated circuit structure
LSI LOGIC CORP16 citations82
US6424019B1Jul 23, 2002
Shallow trench isolation chemical-mechanical polishing process
LSI LOGIC CORP9 citations73
US6087726AJul 11, 2000
Metal interconnect stack for integrated circuit structure
LSI LOGIC CORP14 citations73
US6147409ANov 14, 2000
Modified multilayered metal line structure for use with tungsten-filled vias in integrated circuit structures
LSI LOGIC CORP10 citations72