Inventor
MAEZONO TOMIYASU
JP3 patents
Patents
3 patentsUS10067514B2Sep 4, 2018
Substrate processing apparatus and liquid mixing method
TOKYO ELECTRON LTD4 citations69
US11043399B2Jun 22, 2021
Substrate processing apparatus and operation method of substrate processing apparatus
TOKYO ELECTRON LTD0 citations45
US9862007B2Jan 9, 2018
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
TOKYO ELECTRON LTD0 citations38