Inventor
NAKADA SUMITO
JP3 patents
Patents
3 patentsUS9236154B2Jan 12, 2016
Charged-particle beam drawing method, computer-readable recording media, and charged-particle beam drawing apparatus
NUFLARE TECHNOLOGY INC1 citations45
US10153130B2Dec 11, 2018
Charged particle beam drawing apparatus and charged particle beam drawing method
NUFLARE TECHNOLOGY INC0 citations40
US9460892B2Oct 4, 2016
Charged particle beam writing method, computer-readable recording medium, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations35