Inventor
ZHOU YUSHENG
US6 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU YUSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS10636628B2Apr 28, 2020
Method for cleaning a process chamber
APPLIED MATERIALS INC2 citations72
US12087555B2Sep 10, 2024
Method and system for cleaning a process chamber
APPLIED MATERIALS INC0 citations61
US11532462B2Dec 20, 2022
Method and system for cleaning a process chamber
APPLIED MATERIALS INC0 citations61
US11276569B2Mar 15, 2022
On stack overlay improvement for 3D NAND
APPLIED MATERIALS INC0 citations51