Inventor
KLOCHKOV DMITRY
DE8 patents
Patents
8 patentsUS12288706B2Apr 29, 2025
Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures
ZEISS CARL SMT GMBH0 citations60
US12148139B2Nov 19, 2024
Methods and evaluation devices for analyzing three-dimensional data sets representing devices
ZEISS CARL SMT GMBH0 citations59
US12056865B2Aug 6, 2024
Wafer-tilt determination for slice-and-image process
ZEISS CARL SMT GMBH0 citations59
US11848172B2Dec 19, 2023
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations59
US12283504B2Apr 22, 2025
Contact area size determination between 3D structures in an integrated semiconductor sample
ZEISS CARL SMT GMBH0 citations58
US11915908B2Feb 27, 2024
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations58
US12557588B2Feb 17, 2026
Methods of cross-section imaging of an inspection volume in a wafer
ZEISS CARL SMT GMBH0 citations49
US12288705B2Apr 29, 2025
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
ZEISS CARL SMT GMBH0 citations47